| 摘要 |
PROBLEM TO BE SOLVED: To provide a high concentration ozone gas containing no nitrogen oxide at a high efficiency even in case a feed gas of an extremely high purity oxygen (not lower than 99.9%) is used. SOLUTION: In this unit, there are two electrodes 11 and 12, and in between them an electric discharge is generated by applying an alternate current voltage, and at least a dielectric matter 22 is set between the electrodes, and ozone is generated in the discharge zone 40 by supplying a feed gas containing oxygen. At least one of the electrodes and the surface of the dielectric matter being in the discharging zone facing the discharge have a surface resistivity of 10<SP>4</SP>-10<SP>11</SP>Ωand the feed gas supplied in the discharge zone is a high purity oxygen of not lower than 99.9%. COPYRIGHT: (C)2006,JPO&NCIPI
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