| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device capable of smoothly conveying a tape. SOLUTION: A direction-changing guide 26 of CSP tape 16 has a hollow pipe structure and a circular guide surface 26A. Compression air from a compressor is fed to the inside through a pipe 82 and air is jetted from a large number of fine holes 62 formed on the guide surface 26A toward the outside of the guide surface 26A to form an air layer between the CSP tape and the guide surface 26A. In the inspection device, since the guide 26 or the like guides the CSP tape 16 at non-contact, resistance at the conveyance is less and it can be conveyed with no problem even if the CSP tape 16 is thin. COPYRIGHT: (C)2006,JPO&NCIPI
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