| 摘要 |
A conductive film is formed on a substrate into which a MEMS circuit is fabricated, and a film of a dielectric A having a low dielectric constant and a film of a dielectric B having a high dielectric constant are formed on the conductive film, followed by the formation of a conductive film over the dielectric films. A millimeter wave is guided along the film of the dielectric B functioning as a dielectric waveguide, and is propagated along its length while being reflected by the conductors.
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