WIRELESS SUBSTRATE-LIKE SENSOR

摘要

In accordance with an aspect of the present invention, a wireless substrate-like sensor (112, 118) is configured to ensure it does not contaminate a semiconductor processing chamber. The sensor (112, 118) is sealed except for one or more apertures (272, 282). In one embodiment, a vent is disposed proximate the apertures. In another aspect, the aperture is coupled to a pressure equalization member (284) that deforms in response to a differential in pressure between the sensor interior and exterior.