| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing single crystals by which the uniformity of oxygen concentration in the radial direction planes of single crystals can be improved, in the case of manufacturing single crystals having a diameter of 300 mm or larger. SOLUTION: This method is a method in which single crystals 16 are pulled up from a melt 15 in a crucible 10 by Czochralski method for manufacturing the single crystals. The pulling-up condition is set so that the diameter of the single crystals 16 is to be 300 mm or larger, and a horizontal magnetic field is impressed to the melt 15 in the crucible 10 while controlling the strength of the magnetic field to be 0.28 T or smaller. COPYRIGHT: (C)2006,JPO&NCIPI
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