发明名称 |
Method of fabricating orientation film for liquid crystal display device |
摘要 |
A method of fabricating an orientation film for a liquid crystal display device is provided. An orientation film is formed on a substrate. An ion-beam irradiation apparatus having an ion generation element is provided. The substrate is placed on a stage in a vacuum chamber. The angle of the substrate is controlled such that the orientation film has a predetermined angle with respect to an ion beam of the ion-beam irradiation apparatus. An ion beam from the ion-beam irradiation apparatus irradiates a surface of the orientation film. The ion beam has an energy intensity of about 300 eV to about 800 eV and a predetermined dose.
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申请公布号 |
US2005252440(A1) |
申请公布日期 |
2005.11.17 |
申请号 |
US20050113760 |
申请日期 |
2005.04.25 |
申请人 |
LG PHILIPS LCD CO., LTD. |
发明人 |
HAM YONG-SUNG |
分类号 |
C30B1/00;C30B3/00;C30B29/54;G02F1/1337;(IPC1-7):C30B1/00 |
主分类号 |
C30B1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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