| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a conductive organic inorganic hybrid thin film comprising crystal particles in the nano-size, characterized by having a porous structure, and mainly composed of molybdenum oxide (MoO<SB>3</SB>), and the conductive organic inorganic hybrid thin film or the like. SOLUTION: This manufacturing method of the electrically-conductive organic inorganic hybrid thin film is characterized by including following processes. In the manufacturing method of the electrically-conductive organic inorganic hybrid thin film comprising crystal particles in the nano-size and having the porous structure is characterized by preparing a highly oriented thin film of molybdenum oxide comprising crystal particles in the nano-size and having the porous structure, and intercalating a conductive polymer or organic ions into the thin film by a chemical reaction. A sensor member manufactured by the method, and responsive to VOC gas with high sensitivity is also provided. COPYRIGHT: (C)2006,JPO&NCIPI
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