| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for measuring a particle diameter distribution of microparticles and its apparatus capable of measuring the microparticles of a diameter of 100 nm or smaller, especially microparticles of a diameter of 50-2 nm, in an aerosol. SOLUTION: In the apparatus provided with a particle accelerating means 11 for accelerating microparticles M to be measured and detecting particle diameters Dp of the microparticles M on the basis of the flying velocity (v) of the microparticles M discharged from the particle accelerating means 11, two pairs of electron guns 13 and 14 and secondary electron multipliers 15 and 16 opposed to them are arranged at a prescribed distance (d) in the flying direction of the microparticles M. The passage of the microparticles M across electron beams irradiated by the electron guns 13 and 14 is sensed by the secondary electron multipliers 15 and 16. On the basis of a time differenceΔt in the sensing of the passage of the microparticles M and the prescribed distance (d), the flying velocity (v) of the microparticles M is detected. COPYRIGHT: (C)2006,JPO&NCIPI
|
