| 摘要 |
To make a plasma resistant seal excellent in both a plasma resisting performance and a sealing performance, and prevent an O-ring from protruding to a vacuum side gap, a plasma seal ( 6 ) made of PTFE having a plasma resisting performance is provided in a plasma irradiating side of an O-ring ( 5 ) as a main seal made of a rubber-like elastic material, an installation groove ( 4 ) shallower than a depth of an installation groove ( 3 ) provided in an installation member ( 2 ) is continuously provided in a plasma irradiation side of the installation groove ( 3 ), the O-ring ( 5 ) is attached to the installation groove ( 3 ), and the plasma seal ( 6 ) is attached to the installation groove ( 4 ) in a compressed state, or the O-ring is attached to the installation groove and the plasma seal is attached to the plasma irradiation side of the same installation groove ( 3 ) in a compressed state.
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