发明名称 |
Conveyor for transporting semiconductor wafers through high temperature zones comprises chain made from ceramic links which are directly connected |
摘要 |
<p>The conveyor for transporting semiconductor wafers through high temperature zones comprises a chain made from ceramic links (5). These are directly connected, a cylindrical head (6) on one end of a link fitting into a groove (7) on the opposite end of an adjacent link.</p> |
申请公布号 |
DE102004019950(A1) |
申请公布日期 |
2005.11.17 |
申请号 |
DE20041019950 |
申请日期 |
2004.04.23 |
申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. |
发明人 |
BIRO, DANIEL;GENTISCHER, JOSEF |
分类号 |
B65G17/08;B65G17/38;B65G17/40;F16G13/00;F16G13/07;F16G13/18;(IPC1-7):B65G17/40 |
主分类号 |
B65G17/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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