| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro-resonator capable of obtaining many more currents in a resonance state by reducing a parasitic capacitance, a manufacturing method of the micro-resonator whereby the micro-resonator can be manufactured with high yield, and an electronic apparatus provided with the micro-resonator. SOLUTION: The micro-resonator 10 is configured such that a resonator 40 is arranged between a fixed electrode 22 including an interdigital part 21 and a fixed electrode 32 including an interdigital part 31. Connection terminals 26, 36 are respectively connected to the fixed electrodes 22, 32 via lead wires 25, 35. The resonator 40 includes a moving electrode 24 arranged so that an interdigital part 23 meshes with the interdigital part 21 of the fixed electrode 22, and a moving electrode 34 arranged so that an interdigital part 33 meshes with the interdigital part 31 of the fixed electrode 32. Each of the structures above configuring the micro-resonator 10 is formed on a glass substrate 50 made of an insulator. COPYRIGHT: (C)2006,JPO&NCIPI
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