发明名称 |
GENERATION OF UNIFORMLY-DISTRIBUTED PLASMA |
摘要 |
Methods and apparatus for generating uniformly-distributed plasma are described. A plasma generator according to the invention includes a cathode assembly (204) that is positioned adjacent to an anode (216) and forming a gap (220) there between. A gas source (228) supplies a volume of feed gas and/or a volume of excited atoms to the gap between the cathode assembly and the anode. A power supply (202) generates an electric field across the gap between the cathode assembly and the anode. The electric field ionizes the volume of feed gas and/or the volume of excited atoms that is supplied to the gap, thereby creating a plasma in the gap. |
申请公布号 |
WO2004102610(A3) |
申请公布日期 |
2005.11.17 |
申请号 |
WO2004US13053 |
申请日期 |
2004.04.27 |
申请人 |
ZOND, INC.;CHISTYAKOV, ROMAN |
发明人 |
CHISTYAKOV, ROMAN |
分类号 |
C23C14/34;C23C14/35;H01J37/32;H01J37/34 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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