| 摘要 |
<p>A film for display board provided with an aluminum oxide thin film, which has high gas barrier characteristic, flexibility and solvent resistance, and further more, high adhesiveness and flatness, is manufactured by a high-productivity method without using a vacuum process, and an organic EL element having a high emission brightness is provided. Specifically, the film for display board provided with the aluminum oxide thin film expressed by a general formula (1) AlxOyCz, a manufacturing method therefor and the organic EL element are provided. (In the formula, x is 0.30-0.45, y is 0.40-0.65 and z is 0-0.20 in atomic ratio, and x+y+z=1.) The aluminum oxide thin film is formed by supplying a mixed gas containing an organic aluminum compound between opposing electrodes under an atmospheric pressure or a pressure close to the atmospheric pressure, applying a high-frequency voltage to have the mixed gas in an excited state, and by bringing the mixed gas in the excited state into contact with a transparent plastic film board.</p> |
