| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high-sensitivity sensor with regard to a piezoelectric/electrostrictive film element that is related to the piezoelectric/electrostrictive film element, and is used for especially actuators utilizing bending displacement, for example, microphones, sensors of fluid characteristics or sound pressure, very small weight, acceleration or the like, for example, viscosity sensors. <P>SOLUTION: The piezoelectric/electrostriction film element is formed by sequentially laminating a lower electrode and an auxiliary electrode, a piezoelectric/electrostriction film and an upper electrode on a substrate, comprising ceramics having a thin diaphragm section provided with a thick diaphragm on the circumference. In this case, the length of the upper electrode is 30% or higher and 70% or lower of that of the thin diaphragm. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
