| 摘要 |
PROBLEM TO BE SOLVED: To provide a dielectric barrier discharge excimer light source, capable of obtaining a light of high luminance, having a wavelength in the vacuum ultraviolet-ray region, and efficiently irradiating an object to be irradiated with the light. SOLUTION: An anode electrode 10 is composed of a straight longitudinal cylindrical body, and its outer periphery of the cylindrical body is covered by a dielectric 12. The shape of a cathode part 20 is straight and semicircular. The cathode 25 surrounds the anode, and the anode and the cathode are arranged in parallel with each other in the longitudinal direction. The cathode has a cathode wire group 16, and both ends of wires of the cathode wire group are fixed to both ends 20D, in the longitudinal direction of the semicircular body so that the plurality of wires become parallel to each other. A reflection face, reflecting the radiation in a range of vacuum ultraviolet-ray, is formed on a surface 20S of the cathode part on the facing side of the anode. COPYRIGHT: (C)2006,JPO&NCIPI
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