INTEGRATED PROCESS CONDITION SENSING WAFER AND DATA ANALYSIS SYSTEM
摘要
<p>A process condition measuring device and a handling system may be highly integrated with a production environment where the dimensions of the process condition measuring device are close to those of a production substrate and the handling system is similar to a substrate carrier used for production substrates. Process conditions may be measured with little disturbance to the production environment. Data may be transferred from a process condition-measuring device to a user with little or no human intervention.</p>
申请公布号
WO2005109474(A1)
申请公布日期
2005.11.17
申请号
WO2005US14832
申请日期
2005.04.29
申请人
SENSARRAY CORPORATION;RENKEN, WAYNE GLENN;JENSEN, EARL M.;GORDON, ROY;PAQUETTE, BRIAN;SUN, MEI H.
发明人
RENKEN, WAYNE GLENN;JENSEN, EARL M.;GORDON, ROY;PAQUETTE, BRIAN;SUN, MEI H.