发明名称 EVALUATION METHOD AND ADJUSTING METHOD OF LIGHT INTENSITY DISTRIBUTION, LIGHTING OPTICAL DEVICE, EXPOSURE DEVICE AND EXPOSURE METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide an evaluation method for quantitatively and high precision evaluating the symmetry uniformity of light intensity distribution formed on a lighting pupil face of a lighting optical device, for example. <P>SOLUTION: The method includes a setting process (S2) for setting a first division region and a second division region, which are almost symmetrical on a division line, passing a center point of light intensity distribution in the region of light intensity distribution; a calculating process (S3) for calculating a first light intensity calculation value, obtained by integrating light intensity distribution in the first division region for the first division region; and a second light intensity calculation value obtained by integrating light intensity distribution in the second division region for the second division region; and a deciding process (S4) judging symmetrical uniformity on the division line of light intensity distribution, based on the first light intensity calculated value and the second light intensity calculation value. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005322855(A) 申请公布日期 2005.11.17
申请号 JP20040141451 申请日期 2004.05.11
申请人 NIKON CORP 发明人 NISHINAGA HISASHI
分类号 G01J1/02;G01J1/42;G03F7/20;H01L21/027 主分类号 G01J1/02
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