| 摘要 |
The present invention creates a micromechanical piezoresistive pressure sensor device having a sensor substrate ( 1 ), in which an essentially rectangular diaphragm region ( 50 ) is provided; a piezoresistive resistance device (S 1 -S 4; S 1, S 2, S 3', S 4 ') having at least one piezoresistive resistor strip (S 1 -S 4; S 1, S 2 ), which runs parallel to the longitudinal edges ( 55 a, 55 b) of the diaphragm device ( 50 ) across the entire length of the diaphragm device ( 50 ) and onto the surrounding sensor substrate ( 1 ); the piezoresistive resistor strip (S 1 -S 4; S 1, S 2 ) having a narrow center region (S 10 -S 40; S 10, S 20, S 30', S 40 ') and widened end regions (S 11, S 12, S 21, S 22, S 31, S 32, S 41, S 42; S 11, S 12, S 21, S 22, S 31', S 32', S 41', S 42 ') and the widened end regions (S 11, S 12, S 21, S 22, S 31, S 32, S 41, S 42; S 11, S 12, S 21, S 22, S 31', S 32', S 41', S 42 ') running across the short edges ( 56 a, 56 b) of the diaphragm device ( 50 ).
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