| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem wherein the distribution of CDM discharge on an LSI chip cannot be measured. SOLUTION: A detection probe 1, having a detector 1a at the tip thereof which can detect a magnetic field, is arranged on the LSI chip 11. A contact maker 2a of a charge/discharge probe 2 is in contact with a pad 11a on the LSI chip 11. The detection probe 1 can move in the XYZ directions with high precision. The detection probe 1 is connected to an oscilloscope 3. When a charge switch SW2 is closed, the LSI chip 11 is charged through the charge/discharge probe 2. When a discharge switch SW1 is closed then, charged electric charges are discharged to the LSI chip. The discharged current is detected with a resistor R1 of a discharged current detection section 7. The detected output is used as a trigger signal which captures an detection output of the probe 1 on the oscilloscope 3. COPYRIGHT: (C)2006,JPO&NCIPI
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