| 摘要 |
PROBLEM TO BE SOLVED: To perform easily a work for adjusting a transmission wavelength by adjusting a tilt angle of an interference filter to incident light, and to heighten wavelength precision. SOLUTION: When adjusting the transmission wavelength of the interference filter having a characteristic transmitting a wavelength near a bright line spectrum of a prescribed element, an optical filter 2 which is a measuring object is irradiated with measuring light from a discharge light source 1 using isotope gas of the element, and transmitted light is subjected to wavelength dispersion by a diffraction grating 33 and detected almost simultaneously by a photodetector 34. A signal processing part 4 displays a light intensity distribution based on the detection signal on a screen of a monitor 5. A bright line spectrum by the light source and a transmission peak of the optical filter appear on the light intensity distribution, and the interval between them can be converted into a wavelength based on a preliminary measuring result. Since the wavelength of the bright line spectrum is known, the wavelength of the transmission peak can be determined easily. COPYRIGHT: (C)2006,JPO&NCIPI
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