| 摘要 |
PROBLEM TO BE SOLVED: To provide a diamond electrode in which a stable metal base material easy to be worked such as titanium and a titanium alloy is used, and electrically conductive diamond is formed on the surface thereof, and to provide a production method therefor. SOLUTION: Electrically conductive diamond is formed on the surface of a valve metal base material by a CVD (Chemical Vapor Deposition) process in such a manner that a valve metal nitride layer is beforehand interposed, or a valve metal nitride layer is beforehand formed on the surface of a valve metal base material, an electrically conductive valve metal oxide layer is formed on the surface thereof as an intermediate layer, and electrically conductive diamond is further formed thereon by a CVD process, or a valve metal nitride is beforehand formed on the surface of a valve metal base material, a valve metal oxide layer comprising platinum group metal and/or the oxide thereof by 1 to 10 mol% is formed on the surface of the nitride, and electrically conductive diamond is further formed thereon by a CVD process, thus, with valve metal as the base material, the diamond electrode can be stably obtained by a CVD process. COPYRIGHT: (C)2006,JPO&NCIPI
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