METHOD FOR CREATING A CONTROL COMMAND FOR A MASK WRITING DEVICE

摘要

Several circuit layouts are broken down according to planes in order to extract a respective circuit model (A-F) for imaging on a photo mask. According to said fracturing process, the circuit models are outputted in a hierarchical data format such that a step for calculation of a common mask layout with an integrated circuit model (A'),i.e. a smashing process, can be carried out in a hierarchic manner, i.e. hierarchic plane by hierarchic plane. Output occurs once again in a hierarchic data format. The calculation time for said smashing is reduced significantly.