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发明名称
DEVICE FOR DEVELOPMENT IN LINE TYPE DRY PHOTORESIST
摘要
申请公布号
KR100530752(B1)
申请公布日期
2005.11.17
申请号
KR19970076313
申请日期
1997.12.29
申请人
SAMSUNG TECHWIN CO., LTD.
发明人
LEE, SANG GYUN;KIM, GI SU
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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