| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a panel of a TFT liquid crystal display device in manufacturing process using only three masks and to provide a method for manufacturing a panel of a TFT liquid crystal display device to significantly decrease the manufacturing cost and to simplify the manufacturing process. SOLUTION: The method includes steps of: forming a transparent conductive layer, a first insulating layer and a second metal layer on a transparent substrate in sequence; forming a source area, a drain area and a pixel electrode area in each pixel region and forming a plurality of data signal lines in the edge of each pixel region by a halftone photolithography and etching process; forming a semiconductor layer and a second insulating layer on the substrate; forming a semiconductor channel area and a plurality of contact holes in the source area and the drain area and on the data signal lines by a photolithography and etching process; forming a third metal layer and a third insulating layer on the substrate; and forming a scanning signal line and a gate line by a photolithography and etching process. The panel of a TFT liquid crystal display device can be manufactured by using only three masks. COPYRIGHT: (C)2006,JPO&NCIPI |
