| 摘要 |
PROBLEM TO BE SOLVED: To shield the unnecessary scattered light inside a substrate generated by miniaturization of a light valve and rising of photoirradiation density accompanying the same from a TFT. SOLUTION: Each pixel electrode PE modulates incident light according to driving by the thin-film transistor TFT and has an opening emitting the modulated light. Each thin-film transistor TFT has an active layer consisting of a semiconductor thin film SL, and insulating films 1 to 5 of multiple layers superposed on each other from above to below on the active layer. The insulating films 1 to 5 of the multiple layers include the inner insulating films 2 and 3 having photoconductivity in contact with the semiconductor thin film SL, and the outer insulating films 1 and 4 superposed thereon. The inner insulating films 2 and 3 are set smaller in refractive index than the outer insulating films 1 and 4 in order to suppress the photoconductivity thereof and the amount of the unnecessary light guided to the semiconductor thin film SL through the inner insulating films 2 and 3 is suppressed. COPYRIGHT: (C)2006,JPO&NCIPI |
