| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas supply integrating unit for supplying process gas which is easily liquefied at normal temperature/normal pressure, while heating and keeping it warm. SOLUTION: The gas supply integration unit has a plurality of gas units. In the gas units, a first manual valve 22 provided to an outlet flow path, an air-operated valve 26 provided to a position communicating the first hand valve 22 and a process gas common flow path 44, and a second manual valve 25 provided to a position communicating the first manual valve 22 and a purge gas common flow path 43, are integrally connected in series by means of a flow path block 46 and a unit fixing plate 15. It has a holding member 18 of a U-shaped cross section, where the flow path block 46 and the unit fixing plate 15 are fit, and a planar heater 16 which is fixed being held between the holding member 18 and the flow path block 46 and the unit fixing plate 15. COPYRIGHT: (C)2006,JPO&NCIPI
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