| 摘要 |
PROBLEM TO BE SOLVED: To provide the frequency response characteristic measuring device of an optical deflection mirror system for highly accurately measuring measurement resolution over a wide dynamic range. SOLUTION: The frequency response characteristic measuring device of the optical deflection mirror device 2 has an optical deflection mirror 6 vibrated in order to reflect laser light in a different direction. The device comprises: a detachable unit 22 for attaching and detaching the optical deflection mirror device; a light source 8 for emitting laser light; a drive signal generator 23 for forming a drive signal in order to vibrate the optical deflection mirror; a photodetector 10 for receiving light reflecting on the optical deflection mirror; an amplitude calculator 30 for finding the amplitude of a light receiving signal; a frequency response characteristic calculator 32 for obtaining the frequency response characteristics of the deflection angle of the optical deflection mirror device to the frequency of the drive signal, by finding the deflection angle of the optical deflection mirror on the basis of a distance between the optical deflection mirror and the photodetector and the amplitude obtained in the amplitude calculation part; a moving means 42 for relatively moving the photodetector to the optical deflection mirror device; and a control unit 44 controlling so as to measure the frequency response characteristics in the state in which the distance is set in the optimum distance next, by finding the optimum distance on the basis of initial frequency response characteristics. COPYRIGHT: (C)2006,JPO&NCIPI
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