发明名称 Fluidregelvorrichtung
摘要 <p>Lower members of each of lines A, B, C, D, E, P are mounted on a subbase panel 3 with screws, upper members 11, 12, 13, 14, 15, 16, 17, 18, 19 of each line are mounted on the lower members with screws, and the subbase panels 3 is mounted on a single main base panel 2. Channel connecting means 50 is removable upward.</p>
申请公布号 DE60106312(T2) 申请公布日期 2005.11.17
申请号 DE2001606312T 申请日期 2001.03.08
申请人 TOKYO ELECTRON LTD., TOKIO/TOKYO;FUJIKIN INC., OSAKA 发明人 KEN ISHI, SAWAI-KU;TSUNEYUKI OKABE, TOKYO ELECTRON
分类号 F15B1/00;F16K27/00;(IPC1-7):F16K27/00 主分类号 F15B1/00
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