发明名称 CMOS image sensor for improving photosensitivity and brightness ratio and a method thereof
摘要 A CMOS image sensor for improving light sensitivity and peripheral brightness ratio, and a method for fabricating the same. The CMOS image sensor includes a substrate on which a light sensor and device isolating insulation films are formed, in which the top of the substrate is coated with a plurality of metal layers and oxide films; a plurality of reflective layers formed inside the metal layers, each being spaced apart; a color filter embedded in a groove formed by etching the oxide films inside the reflective layers by a predetermined thickness; a plurality of protrusions formed on both sides of the top of the color filter, each arranged at a predetermined distance from one another; a flat layer formed on the top of the protrusions and the oxide films; and a micro-lens formed on the top of the flat layer. The reflective layer disposed at the top of the photodiode is made of a material having a high reflectance and low absorptivity. Therefore, light incident on the virtual focus plane on the top portion of the reflective layer converges on the photodiode, and thus, the light sensitivity of the sensor is greatly improved.
申请公布号 US2005253212(A1) 申请公布日期 2005.11.17
申请号 US20050129435 申请日期 2005.05.16
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 NAM SEUNG-HO;KIM JIN-HWAN;SUNG GEE-YOUNG
分类号 H01L27/14;H01L27/146;H01L27/148;H01L31/0216;H04N5/335;H04N5/357;H04N5/369;H04N5/374;(IPC1-7):H01L31/062 主分类号 H01L27/14
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