| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning tape for use in precision polish, which does not cause scratches on the surface of a solid body and can efficiently remove a foreign object stuck on the surface of the solid body. SOLUTION: The cleaning tape consists of a fiber material layer having a protruded filament loop on the one surface, an abrasive material layer coated on the filament loop, and a film layer attached on the other surface of the fiber material layer. COPYRIGHT: (C)2006,JPO&NCIPI
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