| 摘要 |
PROBLEM TO BE SOLVED: To provide a washing method with high cleaning degree capable of removing contaminants such as an incineration substance which cannot be removed by conventional washing methods. SOLUTION: This washing method for a material to be washed includes a heating/cooling step for heating/cooling the material to be washed in a furnace after a deposition substance on the material to be washed is removed by injecting a solid carbonic acid particle to the material to be washed. The washing method includes an immersion step for immersing the heated/cooled material to be washed into pure water having a specific resistance of 15 MΩor higher; and an ultrasonic vibration step for imparting ultrasonic vibration to the material to be washed in the immersion step. The washing method includes a first drying step for drying the material to be washed under a nitrogen atmosphere of 50°C or higher after the washing. COPYRIGHT: (C)2006,JPO&NCIPI
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