发明名称 Semiconductor device and manufacturing method thereof
摘要 A semiconductor device comprises a support layer made of semiconductor, a diffusion layer formed by implanting impurities in a surface layer of the support layer, a buried insulating layer provided on the diffusion layer, an island-like active layer provided on the buried insulating layer, a channel region formed in the active layer, source and drain regions formed in the active layer, sandwiching the channel region, a gate insulating film formed on the channel region, a gate electrode formed on the gate insulating film and on side surfaces of the island-like active layer, and insulated and isolated from the channel, source, and drain regions, and an electrode connected to the active layer.
申请公布号 US2005253196(A1) 申请公布日期 2005.11.17
申请号 US20050137539 申请日期 2005.05.26
申请人 YAGISHITA ATSUSHI;MIZUSHIMA ICHIRO;SATO TSUTOMU 发明人 YAGISHITA ATSUSHI;MIZUSHIMA ICHIRO;SATO TSUTOMU
分类号 H01L21/76;H01L21/336;H01L21/762;H01L21/8238;H01L21/84;H01L27/08;H01L27/092;H01L27/12;H01L29/786;(IPC1-7):H01L27/01 主分类号 H01L21/76
代理机构 代理人
主权项
地址