发明名称 Trench corner effect bidirectional flash memory cell
摘要 A non-volatile memory cell structure that is capable of holding two data bits. The structure includes a trench in a substrate with two sides of the trench being lined with a trapping material. The trench is filled with an oxide dielectric material and a control gate is formed over the oxide-filled trench. Source/drain regions are adjacent the trench sides with the trapping material. An energy barrier between the drain and source regions has two local high points that correspond to the trench corners. To read the device, sufficient gate voltage is applied to invert the channel and a sufficient drain voltage is applied to pull down the drain-side barrier. If charges of opposite polarity are trapped in the source-side trench corner, the source barrier will be significantly lowered so that current flows between source and drain under read conditions.
申请公布号 US2005253185(A1) 申请公布日期 2005.11.17
申请号 US20050188556 申请日期 2005.07.25
申请人 MICRON TECHNOLOGY, INC. 发明人 SMITH MICHAEL
分类号 H01L21/335;H01L21/336;H01L21/8238;H01L29/423;H01L29/76;H01L29/788;H01L29/792;(IPC1-7):H01L29/788 主分类号 H01L21/335
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