发明名称 METHODS AND APPARATUS FOR INSTALLING A SCRUBBER BRUSH ON A MANDREL
摘要 In a first aspect, a method is provided for assembling a scrubber brush assembly. The method includes the steps of (1) inserting one or more inserts into an opening of a scrubber brush, wherein the opening of the scrubber brush is defined by an interior surface of the scrubber brush; (2) inserting a mandrel into the opening of the scrubber brush such that the one or more inserts are between an exterior surface of the mandrel and the interior surface of the scrubber brush; and (3) removing the one or more inserts to allow the exterior surface of the mandrel to contact the interior surface of the scrubber brush, thereby installing the scrubber brush onto the mandrel. Numerous other aspects are provided.
申请公布号 WO2005072560(A3) 申请公布日期 2005.11.17
申请号 WO2005US02753 申请日期 2005.01.28
申请人 APPLIED MATERIALS, INC. 发明人 YODOVSKY, JOSEPH;NGO, TAI, T.;VOLFOVSKI, LEON;COULIN, ANNE-DOUCE
分类号 A46B7/10;A46B13/00;A46D1/00;H01L21/00 主分类号 A46B7/10
代理机构 代理人
主权项
地址