| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for producing nitrogen gas, by which high purity nitrogen gas almost free from oxygen gas is easily and inexpensively produced. <P>SOLUTION: In the apparatus for producing high purity nitrogen gas, a nitrogen gas production units 20, 90 for eliminating an oxygen-enriched gas 301, 305 and producing a gas containing nitrogen gas as a main component and oxygen as an impurity from a compressed air, a hydrogen gas generation unit 30 installed with a flow control valve 32, which produces a mixed gas by feeding hydrogen gas of a pressure higher than that of the gas containing nitrogen gas as the main component and oxygen as the impurity to the gas, a catalyst tank 40 for promoting the reaction of forming water from oxygen gas and hydrogen gas, contained in the gas containing nitrogen gas as the main component and oxygen as the impurity in the mixed gas, and a cooling unit 50 for cooling generated steam are arranged. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
