| 摘要 |
PROBLEM TO BE SOLVED: To inhibit a film formed on a substrate arranged on a substrate dome from forming non-uniform thickness distribution, due to thermal expansion and centrifugal force by rotation, which come out during forming the film in the substrate dome. SOLUTION: A vacuum device consists of a vacuum chamber, and a substrate dome which mounts a substrate to be film-formed thereon and is arranged so as to face the bottom of the vacuum chamber, wherein the substrate dome is formed of titanium or a titanium alloy. COPYRIGHT: (C)2006,JPO&NCIPI
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