发明名称 |
Correction of overlay offset between inspection layers |
摘要 |
A method for determining between at least three origins of a coordinate system used for at least three different defect inspection spaces. The method comprises: collecting multiple sets of data spanning defect inspection spaces; filtering the data sets to remove points that introduce noise into correlation calculations; determining whether different data sets show correlation; selecting pairs of data sets showing correlation greater than or equal to a metric; and calculating coordinate offsets of at least three origins based on the selected pairs of data sets. |
申请公布号 |
AU2002362657(A8) |
申请公布日期 |
2005.11.17 |
申请号 |
AU20020362657 |
申请日期 |
2002.10.04 |
申请人 |
HPL TECHNOLOGIES, INC. |
发明人 |
BRIAN DUFFY;JOHN CAYWOOD;JULIE SEGAL;DAVID MURADIAN |
分类号 |
G01N21/956;G03F7/20;G06T7/00;G06T7/40;H01L21/00;H01L21/02;H01L21/66 |
主分类号 |
G01N21/956 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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