发明名称 Interferometric thickness measuring apparatus for thin transparent layers on a moving substrate
摘要 The device has an optical head (26) with rotary unit (30) having a mirror (34) with a plane surface and another mirror (38) deviating an incident light beam (28) in a direction of a thin transparent layer (2). The head moves rotatively at a speed permitting a light beam projected on the layer to follow rectilinear pattern on certain distance, where the speed is synchronized with a moving speed of the layer.
申请公布号 EP1596157(A1) 申请公布日期 2005.11.16
申请号 EP20040010795 申请日期 2004.05.06
申请人 THOMAS, EDYE 发明人 THOMAS, EDYE
分类号 G01B11/06 主分类号 G01B11/06
代理机构 代理人
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