Method of selecting layer thicknesses of a reflective element for extreme ultra violet radiation,申请号EP20030400006-传众专利搜索

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发明名称	Method of selecting layer thicknesses of a reflective element for extreme ultra violet radiation
摘要
申请公布号	EP1351258(B1)	申请公布日期	2005.11.16
申请号	EP20030400006	申请日期	2003.03.03
申请人	FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.	发明人	BRAUN, STEFAN;MAI, HERMANN
分类号	G02B5/08;G21K1/06;(IPC1-7):G21K1/06	主分类号	G02B5/08
代理机构		代理人
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