发明名称 |
CAPACITOR, SEMICONDUCTOR DEVICE WITH A CAPACITOR AND METHOD OF MANUFACTURING THEREOF |
摘要 |
Semiconductor devices having capacitors formed of a high-k dielectric and a pair of interconnections on either side of the dielectric are provided along with methods of fabricating such semiconductor devices. The interconnections comprise a via and a metal layer. |
申请公布号 |
EP1595268(A1) |
申请公布日期 |
2005.11.16 |
申请号 |
EP20040711619 |
申请日期 |
2004.02.17 |
申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
BARTH, HANS-JOACHIM;FELSNER, PETRA;KALTALIOGLU, ERDEM;KERST, UWE;SCHAFBAUER, THOMAS |
分类号 |
H01G4/06;H01G4/228;H01G4/33;H01G4/40;H01L21/768;H01L21/77;H01L21/8242;H01L27/02;H01L27/108;(IPC1-7):H01G4/06 |
主分类号 |
H01G4/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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