METHOD OF FORMING A Ta2O5 COMPRISING LAYER,申请号EP20040707748-传众专利搜索

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发明名称	METHOD OF FORMING A Ta2O5 COMPRISING LAYER
摘要
申请公布号	EP1595005(A1)	申请公布日期	2005.11.16
申请号	EP20040707748	申请日期	2004.02.03
申请人	MICRON TECHNOLOGY, INC.	发明人	VAARTSTRA, BRIAN, A.;DOAN, TRUNG, TRI
分类号	C23C16/40;C23C16/44;C23C16/455;C23C16/511;(IPC1-7):C23C16/40	主分类号	C23C16/40
代理机构		代理人
主权项
地址

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