| 发明名称 |
Wien filter and electron microscope using same |
| 摘要 |
<p>A Wien filter is provided in which a reduced amount of secondary aberration is produced. This filter has 12 poles (P1-P12). These poles have front ends (P'1-P'12) facing the optical axis. These front ends have a 12-fold rotational symmetry about the optical axis (O) within the XY-plane perpendicular to the optical axis. <IMAGE></p> |
| 申请公布号 |
EP1335402(A3) |
申请公布日期 |
2005.11.16 |
| 申请号 |
EP20030250799 |
申请日期 |
2003.02.07 |
| 申请人 |
JEOL LTD. |
发明人 |
LOPEZ, MARTINEZ G.;TSUNO, KATSUSHIGE |
| 分类号 |
H01J37/05;H01J37/26;(IPC1-7):H01J37/05 |
主分类号 |
H01J37/05 |
| 代理机构 |
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代理人 |
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| 地址 |
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