发明名称 HIGH DIELECTRIC CONSTANT INSULATING FILM, THIN-FILM CAPACITIVE ELEMENT, THIN-FILM MULTILAYER CAPACITOR, AND METHOD FOR MANUFACTURING THIN-FILM CAPACITIVE ELEMENT
摘要 A dielectric thin film (8) comprises a first bismuth lamellar compound layer (8a) which is expressed by the chemical formula: (Bi2O2)2+(Am-1B mO3m+1)2- or Bi2Am-1Bm O3m+3, wherein m represents a positive number, A represents at least one element selected among Na, K, Pb, Ba, Sr, Ca and Bi, and B represents at least one element selected among Fe, Co, Cr, Ga, Ti, Nb, Ta, Sb, V, Mo and W. A second bismuth lamellar compound layer (8b) containing more bismuth than the first bismuth lamellar compound (8a) is formed between the first bismuth lamellar compound layer (8a) and a lower electrode (6).
申请公布号 KR20050108368(A) 申请公布日期 2005.11.16
申请号 KR20057016007 申请日期 2005.08.26
申请人 TDK CORPORATION 发明人 MIYAMOTO YUKI;SAKASHITA YUKIO
分类号 C01G29/00;C04B35/475;H01G4/12;H01G4/30;H01L21/02;(IPC1-7):H01G4/33 主分类号 C01G29/00
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