SOLID IMMERSION LENS AND MICROSCOPE

摘要

A solid immersion lens (1) has a spherical section (2) and a bottom surface section (3). The bottom surface section (3) is closely attached to the substrate (10) of a semiconductor device which is an observation subject. The bottom surface section (3) of this solid immersion lens (1) is cylindrically formed, thereby providing a solid immersion lens capable of being easily separated from the observation subject after observation and of passing a light flux having high NA during observation; and a microscope using the same.