| 摘要 |
This invention provides an X-ray analysis apparatus and method capable of simply and accurately determining the position of analysis in a sample from an optical image of it without lowering the sensitivity and/or the spatial resolution in light element analysis. The X-ray analysis apparatus of the present invention irradiates a sample with X-rays narrowed down by means of an X-ray guide member from above the sample in which said sample is directly irradiated with X-rays from said X-ray guide member and an optical image of said sample is obtained in the direction coaxial with said X-ray guide member.
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