发明名称 Positioning system and exposure apparatus having the same
摘要 Disclosed is a positioning system effective to cancel a moment reaction force, and it includes a movable portion and a reaction force absorbing mechanism for absorbing a propulsion reaction force to be produced by motion of the movable portion. A first distance between a reference plane and a gravity center position of the movable portion, being supported for movement along the reference plane, and a second distance between the reference plane and a gravity center position of the reaction force absorbing mechanism are made substantially equal to each other, and/or the second distance and a third distance between the reference plane and a motor movable element for propelling the movable portion along the reference plane are made substantially equal to each other.
申请公布号 US6965426(B2) 申请公布日期 2005.11.15
申请号 US20030694083 申请日期 2003.10.28
申请人 CANON KABUSHIKI KAISHA 发明人 TAKASHIMA TSUNEO
分类号 H01L21/68;G03B27/58;H01L21/027;(IPC1-7):G03B27/42 主分类号 H01L21/68
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