| 摘要 |
The proposed device for controlling the process of forming a structure with nanometric elements contains a unit for setting parameters, a unit for feeding the pointed emitter, a current controller, and additionally, a unit for controlling ionization process. The output of the feeding unit is connected to the input of the current controller. The output of the current controller is connected to the input of the setting unit. The input of the ionization unit is connected to the output of the setting unit, and the output is connected to the input of the feeding unit. The advantage of the proposed device is a possibility to provide the controllability in forming structures with nanometric elements and, as a result, a possibility to extend the functionality range of the device.
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