Static switch for excimer laser, has switching turns, divided into groups, with outlet contacts, where contacts of same group are connected to related conducting plates connected to related bonding pads connected to set turns in parallel

摘要

The switch has switching turns (T1-T10) divided into groups, where each turn has an outlet contact (T90). The contacts of the turns of same group are connected to corresponding conducting plates (C30) connected to related bonding pads. The pads are electrically isolated form each other. The pads are connected for setting the turns in parallel. The control of charge transfer is applied simultaneously to each turn.