THIN-FILM PIEZOELECTRIC RESONATOR MANUFACTURING METHOD, THIN-FILM PIEZOELECTRIC RESONATOR MANUFACTURING APPARATUS, THIN-FILM PIEZOELECTRIC RESONATOR, AND ELECTRONIC COMPONENT

摘要

A method for manufacturing a thin-film piezoelectric resonator (1), wherein a piezoelectric film (4) covering a lower electrode (3) on a base (2) is formed over the base (2), an electrode material layer (6b) for forming an upper electrode (6) is formed over the piezoelectric film (4), a mask having a predetermined shape is formed on the electrode material layer (6b), and the electrode material layer (6b) is etched to form the upper electrode (6). Before the step of forming the electrode material layer (6b), a protective layer (5) adapted to protect the piezoelectric film (4) during the etching of the electrode material layer (6b) and covering at least the portion of the piezoelectric film (4) where the upper electrode (6) is not present is formed, and the electrode material layer (6b) covering the protective layer (5) is formed.