| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric component which is thin and miniaturized, improves air-tightness reliability and includes a cavity structure. SOLUTION: In a piezoelectric component configured by making a pair of sealing substrates 3 adhere to both upper and lower surfaces of a piezoelectric substrate 1 on which a pair of vibrating electrodes 2 are attached, via a pair of sealing materials 4 surrounding the vibrating electrodes 2 and by attaching an external electrode 7 electrically connected with a pull-out portion 8 which extends from the vibrating electrodes 2 to the outer periphery of the piezoelectric substrate 1, on side surfaces of the sealing substrates 3 and the piezoelectric substrate 1, the pair of sealing materials 4 are formed with adhesion width gradually expanded from the side of the piezoelectric substrate 1 toward the side of each sealing substrate 3, and the inner periphery of an adhesion portion to the sealing substrate 3 is positioned inner than the inner periphery of an adhesion portion to the piezoelectric substrate 1. COPYRIGHT: (C)2006,JPO&NCIPI
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